I am a graduate student at the University of Maryland's Department of Electrical Engineering, pursuing a degree in Microelectronics. My research involves the use of focused ion beams to selectively modify material on a sub-micron scale.
My Masters' research was on the use of focused ion beams to deposit platinum across gaps in a thin silicon membrane, for use in repairing defects in stencil masks. The platinum can be deposited on the sides of a gap, then extended across the gap to form a bridge. This bridge can then be milled down with a lower current ion beam, to a desired dimension.
My doctoral reseach, which is ongoing, is to fabricate a field effect transistor, without using conventional lithography masks. I am using a 150 kV focused ion implanter to define patterns in PMMA and implant dopants. My advisor for this research is Dr. John Melngailis.
Questions? Email me.