Design of a Wide-range Non-contact Temperature Measurement
and Control System for a 2.45 GHz Microwave Furnace*

E. Pert, J. Calame**, D. Gershon, Y. Carmel,
I. Lloyd, O. Wilson, T. Olorunyolemi
Institute for Plasma Research
University of Maryland, College Park, Maryland 20742
**Naval Research Laboratory, Washington, DC 20375

26th IEEE International Conference on Plasma Science
Monterey, CA, June 20-24, 1999

ABSTRACT. The design of a pyrometric non-contact temperature measurement and control system for a 3kW 2.45 GHz microwave processing furnace is presented. Design considerations specifically relevant to implementing non-contact temperature measurement and control over the wide range of 25 to 2500oC are discussed. The completed system, in use as a research tool for microwave processing studies, provides versatile and contiguous control of sample heating from room temperature to the process temperature, with real-time access to parameters of the power control algorithm.

*Work supported by AFOSR, Ceramic Materials Program.